The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Oct. 19, 2007
Applicant:
Ji Ho Hong, Hwaseong-si, KR;
Inventor:
Ji Ho Hong, Hwaseong-si, KR;
Assignee:
Dongbu Hitek Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 21/8234 (2006.01); H01L 21/44 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a method of manufacturing a semiconductor device. The method comprises consecutively depositing and patterning polysilicon and mask material on a substrate to form a polysilicon layer and a mask layer, reducing a width of the polysilicon layer, depositing and etching insulating material on the substrate to form a spacer on a lateral side of the polysilicon layer, and forming a source/drain region in the substrate at sides of the spacer.