The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Nov. 08, 2005
Srdjan Kordic, Eindhoven, NL;
Sebastien Petitdidier, Gieres, FR;
Janos Farkas, St. Ismier, FR;
Silvio Del Monaco, Avezzano, IT;
Srdjan Kordic, Eindhoven, NL;
Sebastien Petitdidier, Gieres, FR;
Janos Farkas, St. Ismier, FR;
Silvio Del Monaco, Avezzano, IT;
Freescale Semiconductor, Inc., Austin, TX (US);
ST Microelectronics SRL, Agrate Brianza, IT;
ST Microelectronics Crolles SAS, Crolles, FR;
Abstract
A system for removing particles from a polishing pad to improve the efficiency of the removal of material by the polishing pad as part of a chemical-mechanical polishing process, the system comprising a polishing pad; a fluid dispenser arranged to dispense a fluid on the polishing pad; and removal means, wherein the removal means include a heater for increasing the temperature of the fluid dispensed on the polishing pad, and/or voltage means for coupling the polishing pad to a voltage source for repelling charged particles from the polishing pad surface while the fluid dispenser is dispensing the fluid on the polishing pad.