The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
May. 02, 2008
Applicants:
Yoshihiro Maeda, Hachioji, JP;
Fusao Ishii, Menlo Park, CA (US);
Kazuhiro Watanabe, Hachioji, JP;
Hirotoshi Ichikawa, Hachioji, JP;
Inventors:
Yoshihiro Maeda, Hachioji, JP;
Fusao Ishii, Menlo Park, CA (US);
Kazuhiro Watanabe, Hachioji, JP;
Hirotoshi Ichikawa, Hachioji, JP;
Assignees:
Silicon Quest Kabushiki-Kaisha, , JP;
Olympus Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.