The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Feb. 28, 2007
Kees Moddemeyer, Leiden, NL;
Henri Johannes Petrus Vink, The Hague, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Kees Moddemeyer, Leiden, NL;
Henri Johannes Petrus Vink, The Hague, NL;
Pieter Willem Herman de Jager, Rotterdam, NL;
Abstract
An apparatus is described for scanning a circuit structure. The apparatus has a linear sensor () for detecting light intensity as a function of position along the sensor. A transport mechanism () moves a circuit structure (), such as a PCB or a wafer relative to the sensor. The circuit structure is illuminated with an illumination system () that comprises a hollow cylinder () with a mainly diffusively and/or specularly reflecting inner wall surface. The cylinder is arranged in parallel with the sensor and has a first slit () and a second slit () located so that a virtual plane runs through the sensor, the first and second slit to a location for the circuit structure under inspection. The illumination system furthermore comprises a linear light source () in the cylinder or the inner wall of the cylinder. In an embodiment the illumination system comprises a splitting mirror () in the cylinder to reflect light to the circuit structure.