The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Sep. 27, 2007
Young-chul Ko, Yongin-si, KR;
Jin-woo Cho, Seongnam-si, KR;
Woo-hyek Choi, Yongin-si, KR;
Hee-moon Jung, Yongin-si, KR;
Young-chul Ko, Yongin-si, KR;
Jin-woo Cho, Seongnam-si, KR;
Woo-hyek Choi, Yongin-si, KR;
Hee-moon Jung, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
Provided is a two-axis driving electromagnetic actuator that includes a stage that is operative to be actuated about a first axis; an inner frame that that is disposed outside the stage and supports the stage by the first axis; an external frame that is disposed outside the inner frame and supports the inner frame by a second axis which is perpendicular to the first axis; a magnet that provides an electric field between the first axis and the second axis; a first driving coil that is formed on the inner frame and to which a first signal that actuates the stage in a direction of the second axis is applied; and a second driving coil that is formed on the inner frame and to which a second signal that actuates the stage and the inner frame in a direction of the first axis is applied, wherein the first driving coil and the second driving coil are electrically separated from each other.