The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Jan. 07, 2005
Peng Zhang, Quakertown, PA (US);
Bridgette Maria Budhlall, Bethlehem, PA (US);
Gene Everad Parris, Coopersburg, PA (US);
Leslie Cox Barber, Cave Creek, AZ (US);
Peng Zhang, Quakertown, PA (US);
Bridgette Maria Budhlall, Bethlehem, PA (US);
Gene Everad Parris, Coopersburg, PA (US);
Leslie Cox Barber, Cave Creek, AZ (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Suitable additives that may be added into immersion fluids, immersion fluids comprising at least one carrier medium selected from an aqueous fluid, a non-aqueous fluid, and mixtures thereof, and immersions fluids comprising at least one carrier medium and at least one additive useful for performing immersion lithography at an operating wavelength ranging from 140 nm to 365 nm are disclosed herein.