The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Jul. 08, 2005
Markus K. Tilsch, Santa Rosa, CA (US);
Georg J. Ockenfuss, Santa Rosa, CA (US);
Richard I. Seddon, Santa Rosa, CA (US);
Robert E. Hahn, Santa Rosa, CA (US);
Markus K. Tilsch, Santa Rosa, CA (US);
Georg J. Ockenfuss, Santa Rosa, CA (US);
Richard I. Seddon, Santa Rosa, CA (US);
Robert E. Hahn, Santa Rosa, CA (US);
JDS Uniphase Corporation, Milpitas, CA (US);
Abstract
A magnetron sputtering cathode for use in a vacuum deposition process is disclosed wherein the cathode is coated on its sides with an electrically insulating material such as alumina to prevent arcing, and wherein the first end surface of the cathode supports a material to be sputtered. The bottom of the cathode may also be coated with an electrically insulating coating or may be resting upon an insulating platform.