The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Mar. 09, 2004
Applicant:
Yuichiro Ohta, Kawasaki, JP;
Inventor:
Yuichiro Ohta, Kawasaki, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); G02F 1/1339 (2006.01);
U.S. Cl.
CPC ...
Abstract
The vacuum processing apparatus includes a vacuum chamber, a vacuum pump, and a pipeconnecting the vacuum chamber to the vacuum pump to evacuate the vacuum chamber. A flexible pipe is included as a part of the pipe, and a mechanism for fixing the flexible pipe so as not to shrink at the time of evacuation. The mechanism includes a bar for fixing the vacuum pump side of the flexible pipe to a floor. In an embodiment, the vacuum processing apparatus is a substrate bonding apparatus for fabricating a display device.