The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Jul. 09, 2007
Applicant:
Takeo Yajima, Tokyo, JP;
Inventor:
Takeo Yajima, Tokyo, JP;
Assignee:
Koganei Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A chemical liquid supply device applies chemical liquid from a nozzle to a processed object. The nozzle is provided in a moving head, which reciprocates between an applying position and a waiting position and includes an application valve operating so as to take an applying state of applying the liquid from the nozzle and a stopped state of stopping the application. Chemical liquid is pumped from a tank through a filter to a valve chamber of the application valve via a supply tube. The valve chamber is connected to a buffer tank through a circulation tube. The circulation tube is provided with a circulation valve for opening/closing its flow path.