The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Nov. 26, 2008
Applicants:
Johannes Classen, Reutlingen, DE;
Arnd Kaelberer, Schlierbach, DE;
Patrick Wellner, Stuttgart, DE;
Dietrich Schubert, Reutlingen, DE;
Lars Tebje, Reutlingen, DE;
Inventors:
Johannes Classen, Reutlingen, DE;
Arnd Kaelberer, Schlierbach, DE;
Patrick Wellner, Stuttgart, DE;
Dietrich Schubert, Reutlingen, DE;
Lars Tebje, Reutlingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.