The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Jul. 16, 2007
Applicants:
Kenneth R. Elliott, Thousand Oaks, CA (US);
Peter David Brewer, Westlake Village, CA (US);
Yakov Royter, Santa Monica, CA (US);
Inventors:
Kenneth R. Elliott, Thousand Oaks, CA (US);
Peter David Brewer, Westlake Village, CA (US);
Yakov Royter, Santa Monica, CA (US);
Assignee:
HRL Laboratories, LLC, Malibu, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a process for fabricating integrated circuit system. More particularly, the process allows for fabrication of highly integrated system-on-a-chip modules through heterogeneous integration of different semiconductor technologies wherein alignment targets on the base semiconductor are used for precise lateral positioning of device structures above.