The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
May. 01, 2006
Chris Haidinyak, Santa Clara, CA (US);
Jason P. Cain, Sunnyvale, CA (US);
Bhanwar Singh, Morgan Hill, CA (US);
Chris Haidinyak, Santa Clara, CA (US);
Jason P. Cain, Sunnyvale, CA (US);
Bhanwar Singh, Morgan Hill, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
The claimed subject matter provides a system and/or a method that facilitates utilizing a resolution enhancement for a circuit feature. A scanning electron microscope component () can provide at least one two-dimensional image of the circuit feature. An image analysis engine () can analyze the two-dimensional image. An advanced process control (APC) engine () can generate at least one instruction for at least one of a feed forward control and a feedback control and a process component () can utilize the at least one instruction to minimize an error.