The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Jul. 03, 2007
Takanori Matsuda, Chofu, JP;
Kenichi Takeda, Yokohama, JP;
Katsumi Aoki, Yokohama, JP;
Toshihiro Ifuku, Yokohama, JP;
Takanori Matsuda, Chofu, JP;
Kenichi Takeda, Yokohama, JP;
Katsumi Aoki, Yokohama, JP;
Toshihiro Ifuku, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A method of manufacturing a piezoelectric body, formed from a film made of an ABOperovskite oxide crystal epitaxially grown on a substrate, includes forming a film containing an AOcrystal by using an oxide containing an A element and a B element by heating the substrate to a temperature which is equal to or higher than a temperature at which the AOcrystal is formed, and which is lower than a temperature at which the ABOperovskite oxide crystal is formed and changing the film containing the AOcrystal into a film made of the ABOperovskite oxide crystal by heating the substrate to a temperature which exceeds a temperature at which the AOcrystal can be present, and which is equal to or higher than a temperature at which the ABOperovskite oxide crystal is formed.