The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2011
Filed:
Dec. 20, 2009
Kia Silverbrook, Balmain, AU;
Roger Mervyn Lloyd Foote, Balmain, AU;
Angus John North, Balmain, AU;
Jennifer Mia Fishburn, Balmain, AU;
Paul David Lunsmann, Balmain, AU;
Alexandra Artemis Papadakis, Balmain, AU;
Channarayapatna Shankar Lakshmi, Balmain, AU;
Frederik Jacobus Clous, Balmain, AU;
Matthew Stewart Walker, Balmain, AU;
Samuel George Mallinson, Balmain, AU;
Paul Justin Reichl, Balmain, AU;
Kia Silverbrook, Balmain, AU;
Roger Mervyn Lloyd Foote, Balmain, AU;
Angus John North, Balmain, AU;
Jennifer Mia Fishburn, Balmain, AU;
Paul David Lunsmann, Balmain, AU;
Alexandra Artemis Papadakis, Balmain, AU;
Channarayapatna Shankar Lakshmi, Balmain, AU;
Frederik Jacobus Clous, Balmain, AU;
Matthew Stewart Walker, Balmain, AU;
Samuel George Mallinson, Balmain, AU;
Paul Justin Reichl, Balmain, AU;
Silverbrook Research Pty Ltd, Balmain, New South Wales, AU;
Abstract
A MEMS vapor bubble generator includes a chamber for holding liquid; and a heater positioned in the chamber, the heater being formed using a sputtering technique. The heater is formed from a superalloy material. The superalloy material of the heater is in direct contact with the liquid, without any intervening protective coating. The superalloy has a crystalline structure with a grain size less than 100 nano-meters. The superalloy is MCrAlX, where M is one or more of Ni, Co, Fe with M contributing at least 50% by weight, Cr contributing between 8% and 35% by weight, Al contributing more than zero but less than 8% by weight, and X contributing less than 25% by weight, with X consisting of zero or more other elements, preferably including but not limited to Mo, Re, Ru, Ti, Ta, V, W, Nb, Zr, B, C, Si, Y, Hf.