The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Dec. 22, 2009
Bruce L. Couch, North Attleboro, MA (US);
Jonathan S. Erhmann, Sudbury, MA (US);
Yun Fee Chu, Natick, MA (US);
Joseph V. Lento, Methuen, MA (US);
Shepard D. Johnson, Andover, MA (US);
Bruce L. Couch, North Attleboro, MA (US);
Jonathan S. Erhmann, Sudbury, MA (US);
Yun Fee Chu, Natick, MA (US);
Joseph V. Lento, Methuen, MA (US);
Shepard D. Johnson, Andover, MA (US);
GSI Group Corporation, Bedford, MA (US);
Abstract
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. Beam scanning and deflection are both used to distribute beam spots to elements of an array of elements for selective processing. The deflection can be performed with a solid state deflector.