The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2011
Filed:
Sep. 18, 2007
Norinao Kouma, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Ippei Sawaki, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Ippei Sawaki, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.