The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Sep. 26, 2007
Woo Seok Yang, Gyeonggi-do, KR;
Han Young Lee, Gyeonggi-do, KR;
Hyung Man Lee, Gyeonggi-do, KR;
Woo Kyung Kim, Gyeonggi-do, KR;
Soon Sup Park, Gyeonggi-do, KR;
Woo Seok Yang, Gyeonggi-do, KR;
Han Young Lee, Gyeonggi-do, KR;
Hyung Man Lee, Gyeonggi-do, KR;
Woo Kyung Kim, Gyeonggi-do, KR;
Soon Sup Park, Gyeonggi-do, KR;
Abstract
The present invention relates to a fabrication method for a quasi-phase-matched waveguide. The method includes the steps of forming a metal etch mask on a ferroelectric single crystal substrate, etching the substrate by using the etch mask, removing the etch mask, forming conductive layers on the etched substrate, forming polarization regions by applying an electric field to the conductive layers, and flattening the substrate after removing the conductive layers. Accordingly, the present invention is advantageous in that it can be applied to various fields employing a ferroelectric substrate, such as LiNbO, LiTaO, Mg:LiNbOor Zn:LiNbO, it can obtain more accurate and uniform periodic domain inversion devices with a high quality and can fabricate devices that are cheaper and have a better performance.