The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Jan. 12, 2009
Deh-ming Shyu, Miaoli County, TW;
Yi-sha Ku, Hsinchu, TW;
Sen-yih Chou, Taipei, TW;
Shu-ping Dong, Taichung County, TW;
Wei-te Hsu, Taipei County, TW;
Deh-Ming Shyu, Miaoli County, TW;
Yi-Sha Ku, Hsinchu, TW;
Sen-Yih Chou, Taipei, TW;
Shu-Ping Dong, Taichung County, TW;
Wei-Te Hsu, Taipei County, TW;
Industrial Technology Research Institute, Hsin-Chu, TW;
Abstract
A reflective scatterometer capable of measuring a sample is provided. The reflective scatterometer includes a paraboloid mirror, a light source, a first reflector, a second reflector and a detector. The paraboloid mirror has an optical axis and a parabolic surface, wherein the sample is disposed on the focal point of the parabolic surface and the normal direction of the sample is parallel with the optical axis. A collimated beam generated from the light source is reflected by the first reflector to the parabolic surface and then is reflected by the parabolic surface to the sample to form a first diffracted beam. The first diffracted beam is reflected by the parabolic surface to the second reflector and is then reflected by the second reflector to the detector.