The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Jan. 24, 2006
Applicants:
Masaki Kato, Yokohama, JP;
Kenji Shimizu, Kawasaki, JP;
Manabu Toguchi, Yokohama, JP;
Tomoyuki Watanabe, Tokyo, JP;
Inventors:
Masaki Kato, Yokohama, JP;
Kenji Shimizu, Kawasaki, JP;
Manabu Toguchi, Yokohama, JP;
Tomoyuki Watanabe, Tokyo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exposure apparatus for exposure-transferring an image of a pattern projected through an optical system having a plurality of optical units Lto Lonto an object P, comprises a correcting device which corrects a position of at least one of a plurality of images to be projected onto the object P by the plurality of optical units Lto Lso that displacements of the optical units Lto Lare compensated.