The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Mar. 08, 2007
Lonn E. Moore, Millbrook, NY (US);
Rajinder S. Dhaliwal, Hopewell Junction, NY (US);
Maris A. Sturans, Galloway, NJ (US);
Lonn E. Moore, Millbrook, NY (US);
Rajinder S. Dhaliwal, Hopewell Junction, NY (US);
Maris A. Sturans, Galloway, NJ (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, focus and/or deflect the electron beams; and one or more center tubes along the electron beam column that provides a high vacuum environment for and guiding the electron beam to a target object coated with an electron sensitive resist. At least one of the center tubes is a carbon tube made of solid carbon material.