The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Dec. 21, 2005
Matthias Illing, Kusterdingen, DE;
Heribert Weber, Nuertingen, DE;
Christoph Schelling, Stuttgart, DE;
Heiko Stahl, Reutlingen, DE;
Stefan Weiss, Tübingen, DE;
Matthias Illing, Kusterdingen, DE;
Heribert Weber, Nuertingen, DE;
Christoph Schelling, Stuttgart, DE;
Heiko Stahl, Reutlingen, DE;
Stefan Weiss, Tübingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A method for producing a micromechanical diaphragm sensor, and a micromechanical diaphragm sensor produced with the method. The micromechanical diaphragm sensor has at least one first diaphragm as well as a second diaphragm, which is disposed essentially on top of the first diaphragm. Furthermore, the micromechanical diaphragm sensor has a first cavity and a second cavity, which is essentially disposed above the first cavity.