The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Jan. 05, 2006
Min-jeong Hwang, Kyunggi-do, KR;
Kwan-seop Song, Kyunggi-do, KR;
Do-geun Kim, Kyunggi-do, KR;
Jae-hong Ahn, Seoul, KR;
Sung-ho Lee, Kyunggi-do, KR;
Min-Jeong Hwang, Kyunggi-do, KR;
Kwan-Seop Song, Kyunggi-do, KR;
Do-Geun Kim, Kyunggi-do, KR;
Jae-Hong Ahn, Seoul, KR;
Sung-Ho Lee, Kyunggi-do, KR;
Samsung Mobile Display Co., Ltd., Giheung-Gu, Yongin, Gyunggi-Do, KR;
Abstract
In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.