The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2011
Filed:
Sep. 12, 2003
Applicants:
Matthias Aikele, Munich, DE;
Albert Engelhardt, Munich, DE;
Marcus Frey, Bernau, DE;
Bernhard Schmid, Friedberg, DE;
Helmut Seidel, Starnberg, DE;
Inventors:
Matthias Aikele, Munich, DE;
Albert Engelhardt, Munich, DE;
Marcus Frey, Bernau, DE;
Bernhard Schmid, Friedberg, DE;
Helmut Seidel, Starnberg, DE;
Assignee:
Conti Temic microelectronic GmbH, Nuremberg, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
To form an isolation structure in a semiconductor substrate, at least two trenches are formed with a rib therebetween in the semiconductor substrate, and then the semiconductor material in the area of the trenches and particularly the rib is converted to an electrically insulating material. For example, this is accomplished by thermal oxidation of silicon semiconductor material of the rib.