The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Jan. 15, 2007
Aaron Muir Hunter, Santa Cruz, CA (US);
Bruce E. Adams, Portland, OR (US);
Mehran Behdjat, San Jose, CA (US);
Rajesh S. Ramanujam, San Jose, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Bruce E. Adams, Portland, OR (US);
Mehran Behdjat, San Jose, CA (US);
Rajesh S. Ramanujam, San Jose, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention provides apparatus and methods for achieving uniform heating to a substrate during a rapid thermal process. More particularly, the present invention provides apparatus and methods for controlling the temperature of an edge ring supporting a substrate during a rapid thermal process to improve temperature uniformity across the substrate.