The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Jul. 24, 2007
Keisuke Hirano, Saitama, JP;
Keisuke Hirano, Saitama, JP;
Nihon Dempa Kogyo Co., Ltd., Tokyo, JP;
Abstract
To provide a method for manufacturing a piezoelectric resonator which can widen the range of frequency adjustment while saving metal thereby suppressing reduction of the yields when forming a metal film for frequency adjustment at the tip of an vibrating arm. The method of manufacturing the piezoelectric resonator according to the present invention includes the steps of: bringing a substrate in which an outside shape of a piezoelectric oscillating piece is formed, into contact with an etching solution; forming grooves in a plurality of vibrating arms using a mask having an aperture at the portion corresponding to the groove, and having a metal film formed on the whole surface except the aperture; and thereafter, forming a resist mask on the surface of the substrate so that resist is left at the tip of the vibrating arms which will be a formation area of a metal film for frequency adjustment so as to remove the metal film by etching. Then, forming an electrode film after peeling off the resist film left at the tip of the vibrating arm.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile