The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Apr. 09, 2008
Martin R. Elliott, Round Rock, TX (US);
Michael R. Rice, Pleasanton, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Michael R. Rice, Pleasanton, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.