The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2010
Filed:
Jun. 02, 2008
Yoshiaki Shinjo, Kawasaki, JP;
Yuzo Shimobeppu, Kawasaki, JP;
Kazuo Teshirogi, Kawasaki, JP;
Kazuhiro Yoshimoto, Kawasaki, JP;
Yoshiaki Shinjo, Kawasaki, JP;
Yuzo Shimobeppu, Kawasaki, JP;
Kazuo Teshirogi, Kawasaki, JP;
Kazuhiro Yoshimoto, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
A semiconductor wafer storage case is disclosed that includes plural support members that are spaced at predetermined intervals with respect to each other and are each configured to come into contact with a peripheral edge region of a first face of a semiconductor wafer, and an elastic member that elastically supports the support members with respect to each other and is configured to elastically deform to come into contact with a second face of the semiconductor wafer and press the semiconductor wafer onto a corresponding support member.