The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2010
Filed:
Mar. 07, 2008
Applicants:
Tetsuro Saito, Isehara, JP;
Tatsumi Shoji, Hiratsuka, JP;
Yoichi Fukumiya, Yokohama, JP;
Inventors:
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An emitting apparatushas a gas cluster generation chamberand a nozzleas means for generating a gas cluster and emitting the gas cluster to a processing object. A group of gas clusters jetted from the nozzleis shaped into a gas cluster streamin a beam form when passing through a skimmer. Electrons are emitted from an electron gunto the gas cluster stream, whereby the gas cluster in the gas cluster stream is ionized.