The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Feb. 01, 2010
Applicants:
Kimberly Dona Pollard, Anderson, IN (US);
Michael T. Phenis, Markleville, IN (US);
Inventors:
Kimberly Dona Pollard, Anderson, IN (US);
Michael T. Phenis, Markleville, IN (US);
Assignee:
Dynaloy, LLC, Indianapolis, IN (US);
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/30 (2006.01); C11D 3/04 (2006.01); C11D 1/62 (2006.01);
U.S. Cl.
CPC ...
Abstract
Resist stripping agents, useful for fabricating circuits and/or forming electrodes on semiconductor devices for semiconductor integrated circuits with reduced metal etch rates, particularly copper etch rates, are provided with methods for their use. The preferred stripping agents contain low concentrations of a copper salt with or without an added amine to improve solubility of the salt. Further provided are integrated circuit devices and electronic interconnect structures prepared according to these methods.