The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Nov. 07, 2005
Takehiko Komiya, Kitakyushu, JP;
Toshiyuki Osuga, Kitakyushu, JP;
Toshihiro Sawa, Kitakyushu, JP;
Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;
Abstract
To be able to restrain a height of a machine even when the machine is large-sized and smoothly move a table in XYθ directions. An alignment apparatus includes two translational freedom degree guide portion (), one rotational freedom degree guide portion (), a translational drive/translational/rotational freedom degree mechanism module () including a linear motor provided at one of the translational freedom degree guide portion (), a machine base portion (), a reference generator portion (), a two-dimensional position sensor (), a calculating portion of compensation value (). At least three of the translational drive/translational/rotational freedom degree mechanism modules () are uniformly arranged to a table ().