The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2010
Filed:
Sep. 12, 2007
Gregory S. Boettcher, Hopewell Junction, NY (US);
William R. Copeland, Poughkeepsie, NY (US);
Joseph P. Degeorge, Wappingers Falls, NY (US);
Scott M. Hargash, Kingston, NY (US);
William T. Petry, Wappingers Falls, NY (US);
Robert R. Young, Poestenkill, NY (US);
Gregory S. Boettcher, Hopewell Junction, NY (US);
William R. Copeland, Poughkeepsie, NY (US);
Joseph P. DeGeorge, Wappingers Falls, NY (US);
Scott M. Hargash, Kingston, NY (US);
William T. Petry, Wappingers Falls, NY (US);
Robert R. Young, Poestenkill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An apparatus for implementing an emergency machine off circuit of a fabrication system, includes: at least one safety switch adapted for shunting an operation enable signal from a piece of equipment selected for removal from service, the switch also removing from service supplemental devices for the selected equipment. A semiconductor fabrication system and a method for removing equipment from service are provided.