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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7847649 B1

PDFFull Text
Date of Patent:
Dec. 07, 2010

Filed:

Dec. 18, 2006

Mems resonator, a method of manufacturing thereof, and a mems oscillator

Applicants:

Jozef T. M. Van Beek, Rosmalen, NL;

Hans-peter Loebl, Monschau-Imgenbroich, DE;

Frederik W. M. Vanhelmont, Genk, BE;

Inventors:

Jozef T. M. Van Beek, Rosmalen, NL;

Hans-Peter Loebl, Monschau-Imgenbroich, DE;

Frederik W. M. Vanhelmont, Genk, BE;

Assignee:

NXP B.V., Eindhoven, NL;

Attorney:
Primary Examiner:

Arnold Kinkead

Int. Cl.
CPC ...
H03B 5/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a MEMS resonator comprising a movable element (), the movable element () comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element () further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second. Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element ().

Find Patent Forward Citations

Van Beek, Jozef T. M.. (2010). Mems resonator, a method of manufacturing thereof, and a mems oscillator (U.S. Patent No. 7847649). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7847649

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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