Semiconductor memory

Abstract

Borderless contacts for word lines or via contacts for bit lines are formed using interconnect patterns, a part of which is removed. A semiconductor memory includes: a plurality of active regions AA, AA, . . . , AA, which extend on a memory cell array along the column length; a plurality of word line patterns WL, WL, . . . , extend along the row length and are non-uniformly arranged; a plurality of select gate line patterns SG, SG, . . . , are arranged parallel to the plurality of word line patterns; borderless contacts are formed near the ends of the word line patterns on the memory cell array, and are in contact with part of an interconnect extended from the end of the memory cell array, but are not in contact with interconnects adjacent to that interconnect; and bit line contacts are formed within contact forming regions provided by removing part of the plurality of word line patterns and select gate line patterns through double exposure.