Suction device, suction system, and liquid droplet ejection apparatus having the device or the system, as well as electro-optical apparatus and manufacturing method thereof

Abstract

Provided herein is a suction device having a plurality of head caps capable of closely contacting with and moving away from corresponding nozzle surfaces of a plurality of inkjet functional liquid droplet ejection heads. The suction device includes: a plurality of cap units having one or more of the head caps, a contacting/separating mechanism which makes the head caps contact and move away, a plurality of suction units which suck functional liquid from the head caps, a plurality of sets of suction channels each of which having a main channel and individual channels, and a plurality of channel switching units which selectively switch the suction channels to any one of the suction units.