The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Nov. 12, 2005
Werner Saule, Bretten, DE;
Lothar Berger, Illingen, DE;
Christian Krauss, Gomaringen, DE;
Robert Weihing, Mühlacker, DE;
Werner Saule, Bretten, DE;
Lothar Berger, Illingen, DE;
Christian Krauss, Gomaringen, DE;
Robert Weihing, Mühlacker, DE;
Steag Hamatech AG, , DE;
Abstract
This invention relates to a method and a device for the thermal treatment of substrates in which the substrates are held in contact with or a small distance away from a heating plate, which is heated by a plurality of separately controllable heating elements on the side of the heating plate facing away from the substrate, the heating plate being surrounded, at least in its plane, by a frame spaced apart therefrom, and gas being conveyed, in a controlled manner, through a gap between the frame and at least one edge of the heating plate.