The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Sep. 11, 2006
Yoshinao Ooe, Kyoto, JP;
Kazuo Uetani, Osaka, JP;
Akira Shiokawa, Osaka, JP;
Kaname Mizokami, Osaka, JP;
Hiroyuki Kado, Osaka, JP;
Yoshinao Ooe, Kyoto, JP;
Kazuo Uetani, Osaka, JP;
Akira Shiokawa, Osaka, JP;
Kaname Mizokami, Osaka, JP;
Hiroyuki Kado, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A method for manufacturing a protective layer such that when the protective layer is formed in a film-forming chamber, the partial pressure of water in the film-forming chamber is controlled by the exhaust velocity of the water in the film-forming chamber. During formation of the protective layer the total pressure in the film-forming chamber is kept constant. In addition, the partial pressure of the water in the film-forming chamber is controlled while introducing a gas into the film-forming chamber, thereby controlling the ratio of the partial pressure of hydrogen to the partial pressure of oxygen in the film-forming chamber.