The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Sep. 28, 2006
Kenji Takenouchi, Kanagawa, JP;
Kenji Takenouchi, Kanagawa, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
According to an aspect of the invention, there is provided a polishing liquid for polishing a barrier metal material on an interlayer insulation material, the polishing liquid having a pH of from 2.0 to 6.0 and including an aqueous solution containing a compound represented by the following formula (1), and polishing particles containing silicon oxide and dispersed in the aqueous solution: R—(CH)—(CHR)—COOH (1) wherein m+n≦4; Rrepresents a hydrogen atom, a methyl group, an ethyl group or a hydroxyl group; Rrepresents a methyl group, an ethyl group, a benzene ring or a hydroxyl group; and when a plurality of Rs are present in the formula (1), they are the same or different from one another.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile