The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Aug. 03, 2006
Jurgen Henrich, Limeshain, DE;
Andreas Sauer, Grossostheim, DE;
Andreas Geiss, Hanau, DE;
Felix Brinckmann, Darmstadt, DE;
Jurgen Henrich, Limeshain, DE;
Andreas Sauer, Grossostheim, DE;
Andreas Geiss, Hanau, DE;
Felix Brinckmann, Darmstadt, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.