The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Jul. 07, 2005
Yong-chul Park, Seongnam-si, KR;
Woo-sik Jeong, Seoul, KR;
Kwang-chul Hyun, Anyang-si, KR;
Jang-won Lee, Anyang-si, KR;
Ik-hyeon Kwon, Seoul, KR;
Yong-Chul Park, Seongnam-si, KR;
Woo-Sik Jeong, Seoul, KR;
Kwang-Chul Hyun, Anyang-si, KR;
Jang-Won Lee, Anyang-si, KR;
Ik-Hyeon Kwon, Seoul, KR;
Hyosung Corporation, Seoul, KR;
Abstract
Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600° C. for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.