The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Sep. 18, 2007
Takeo Yajima, Tokyo, JP;
Takeo Yajima, Tokyo, JP;
Koganei Corporation, Tokyo, JP;
Abstract
A chemical liquid supplying apparatus capable of discharging chemical liquid with high accuracy and monitoring a leakage of an incompressible medium from a region between a piston and a cylinder is provided. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating within a cylinder hole of the cylinder. A first bellows cover for forming a first seal chamber is provided between a large-diameter piston portion and the cylinder, and a second bellows cover for forming a second seal chamber is provided between a small-diameter piston portion and the cylinder. To detect pressure of the incompressible medium enclosed in the seal chambers, a seal-chamber pressure sensor is attached to the cylinder, and a deterioration degree of seal members is determined by detecting the pressure.