The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2010
Filed:
Feb. 03, 2006
Holger Conrad, Dresden, DE;
Thomas Klose, Dresden, DE;
Thilo Sandner, Dresden, DE;
Abstract
The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.