Method for manufacturing liquid jet head

Abstract

A method for manufacturing a liquid jet head is provided which includes a flow channel board having at least pressure-generating chambers communicating with nozzle holes and a pressure generator above one surface that applies pressure for jetting liquid to the pressure-generating chambers, and a silicon single-crystal reservoir board having at least a reservoir section that communicates with the pressure-generating chambers and that is defined by a through hole passing through the reservoir board and a step with a riser formed so as to open up the through hole at one surface. In the method, a mask pattern having an opening is formed on a reservoir-forming board intended for the reservoir board. The opening has a correction pattern on its wall and a dummy mask pattern is formed in the opening. The correction pattern serves to expose a predetermined crystal plane of the reservoir-firming board to define the riser of the step. The dummy mask pattern has a plurality of separate mask portions and serves to substantially match the etching rate of the reservoir-forming board in the region opposing the correction pattern with the etching rate of the reservoir-forming board in the region opposing the opening of the mask pattern. The reservoir-forming board is anisotropically etched through the mask pattern having the correction pattern and the dummy mask pattern, so that the reservoir section having the step is formed.