The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Jun. 28, 2006
Andrew H. Behr, Littleton, CO (US);
Brian D. Goers, Minneapolis, MN (US);
Vincent J. Laraia, Holton, WI (US);
Gary M. Palmgren, Lake Elmo, MN (US);
Daniel B. Pendergrass, Jr., Mendota Heights, MN (US);
Andrew H. Behr, Littleton, CO (US);
Brian D. Goers, Minneapolis, MN (US);
Vincent J. Laraia, Holton, WI (US);
Gary M. Palmgren, Lake Elmo, MN (US);
Daniel B. Pendergrass, Jr., Mendota Heights, MN (US);
3M Innovative Properties Company, St. Paul, MN (US);
Abstract
The disclosure relates to abrasive articles useful in chemical-mechanical polishing (CMP), the articles including a substrate with opposite major surfaces, an abrasive material overlaying at least a portion of at least one of the major surfaces, and at least one of a radio frequency identification (RFID) tag, a RFID tag reader, or a sensor for providing CMP information to a transmitter positioned near the substrate, the transmitter positioned near the substrate and adapted to wirelessly receive CMP information and wirelessly transmit the CMP information to a remote receiver. The disclosure also relates to a CMP pad conditioner for wirelessly communicating CMP information to a remote receiver, a CMP process monitoring system for wirelessly communicating CMP information to a remote receiver, and a method for conditioning a CMP pad using a CMP process monitoring system for wireless communicating CMP information to a remote receiver.