Trench capacitor device suitable for decoupling applications in high-frequency operation

Abstract

A capacitor device, an electronic circuit comprising a capacitor device, an electronic component, and a method of forming a capacitor device are described. In the capacitor device, a current-path region extends from one of two trench capacitor electrodes to a respective contact structure. The current-path region is obtainable by thinning the substrate from an original substrate thickness down to reduced substrate thickness either in a lateral substrate portion containing the capacitor region or over the complete lateral extension of the substrate before forming the first and second contact structures. The capacitor device exhibits a reduced impedance in the current-path region. This reduced impedance implies a low self-inductance and self-resistance that is caused by the current-path region. The low self-inductance provides an improved signal suppression over a broadened spectral range in a circuit configuration that employs the capacitor device as a bypass capacitor between a signal line and ground potential.