The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Mar. 08, 2007
Marc Sworowski, Caen, FR;
Patrice Gamand, Douvres la Delivrande, FR;
Pascal Philippe, Caen, FR;
NXP B.V., Eindhoven, NL;
Abstract
The invention relates to a MEMS resonator having at least one mode shape comprising: a substrate () having a surface (), and a resonator structure (), wherein the resonator structure () is part of the substrate (), characterized in that the resonator structure () is defined by a first closed trench () and a second closed trench (), the first trench () being located inside the second trench () so as to form a tube structure () inside the substrate (), and the resonator structure () being released from the substrate () only in directions parallel to the surface (). The invention further relates to a method of manufacturing such a MEMS resonator.