The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
May. 17, 2007
Applicants:
Kenji Saitou, Kanagawa, JP;
Kenichi Hidaka, Kanagawa, JP;
Inventors:
Kenji Saitou, Kanagawa, JP;
Kenichi Hidaka, Kanagawa, JP;
Assignee:
Nec Electronics Corporation, Kawasaki, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes a semiconductor substrate having trenches extending thereinto. A trench type insulating film fills the trenches. The trench type insulating film includes a first and second insulating film and is laminated in a portion of the trenches.