The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Jul. 21, 2006
Andrew William Tudhope, Danville, CA (US);
Raul Donate Mercado, Danville, CA (US);
Thomas Bryan Casserly, Dublin, CA (US);
William John Boardman, Danville, CA (US);
Frederick Contreras, Livermore, CA (US);
Andrew William Tudhope, Danville, CA (US);
Raul Donate Mercado, Danville, CA (US);
Thomas Bryan Casserly, Dublin, CA (US);
William John Boardman, Danville, CA (US);
Frederick Contreras, Livermore, CA (US);
Sub-One Technology, Inc., Pleasanton, CA (US);
Abstract
A system () for coating surfaces of a workpiece () comprises a biasing system () for connection to said workpiece () and an anode () such as to negatively bias the workpiece relative to the anode and a vacuum source () for evacuating an interior of the workpiece (). A gas supply () is employed for introducing a gas containing a treatment material to said workpiece and a control system () controls the biasing system (), the vacuum source () and the gas supply () so as to establish a hollow cathode effect within the workpiece (). A pair of coupling heads () are supported on articulated arms () movable in one or more of three axes and include removable shields () to protect the heads () and an anode mount () for receiving an anode (). The articulated arms allow the system to accommodate a plurality of different shaped and different sized workpieces while the shields protect the coupling heads during a deposition process.