The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Apr. 26, 2007
Applicants:
Joel Collet, Saint Martin d'Uriage, FR;
Stephane Nicolas, Meylan, FR;
Christian Pisella, Beaucroissant, FR;
Inventors:
Joel Collet, Saint Martin d'Uriage, FR;
Stephane Nicolas, Meylan, FR;
Christian Pisella, Beaucroissant, FR;
Assignee:
Tronic's Microsystems, Crolles, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/46 (2006.01); H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a process for collective manufacturing of cavities and/or membranes (), with a given thickness d, in a wafer said to be a semiconductor on insulator layer, comprising at least one semiconducting surface layer with a thickness d on an insulating layer, this insulating layer itself being supported on a substrate, this process comprising: