The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Mar. 26, 2009
Kenichi Yokoyama, Nagoya, JP;
Kenichi Yokoyama, Nagoya, JP;
Denso Corporation, Kariya, JP;
Abstract
A method for manufacturing a semiconductor physical quantity sensor having a fixed portion, a movable portion and an output terminal includes: forming a metal layer on a semiconductor layer; forming a resist on the metal layer; forming an opening and a side etching hole in the resist; anisotropically etching the metal layer via the opening and the hole; anisotropically etching the semiconductor layer via the opening so that the fixed portion is formed in the semiconductor layer; and side etching the metal layer from the opening and the hole so that the output terminal is formed on a part of the fixed portion, and a metal member is formed on another part of the fixed portion in such a manner that the metal member is electrically separated from the output terminal.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile