The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 2010

Filed:

Nov. 14, 2007
Applicants:

Yoko Shibasaki, Hiki-gun, JP;

Kenji Kato, Hiki-gun, JP;

Masao Arima, Hiki-gun, JP;

Inventors:

Yoko Shibasaki, Hiki-gun, JP;

Kenji Kato, Hiki-gun, JP;

Masao Arima, Hiki-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

There are provided a photosensitive composition used in one-shot exposure of exposing it via a photomask to light from a UV lamp or in direct writing with light from a UV lamp or laser light to form a patterned latent image to be developed with an alkaline aqueous solution, wherein a difference between maximum absorbance and minimum absorbance, in a wavelength range of 355 to 405 nm, of a dry coating thereof before light exposure is within 0.3 per 25 μm film thickness of the dry coating, and a dry film obtained by applying the photosensitive composition onto a carrier film and then drying it.


Find Patent Forward Citations

Loading…